The included green reference arrow indicates 1mms 1 fiuid velocity and the left hand scale bar is 50 mm. Pdf measurement of chalcogenide glass optical dispersion. Complete system, includes 635 nm laser diode, dell optiplex pc, 4 gb ram, 500 gb hard drive, 8x dvd rw, 22. Metricon s model 2010 m offers important advantages over ellipsometry for many applications unmatched refractive index accuracy, dramatically simpler operation and data analysis, and greater tolerance of poor sample quality. This list of journal references on the prism coupling technique is divided into the following categories. Refractive index of soft contact lens materials measured. The prism coupler is able to make its highly accurate measurements.
Optical properties of nanocrystalline la2o3 dielectric. Apr 01, 2020 for the dailies total 1 lens type, schafer et al. The computer system positions the prism and spectroscopic cell relative to a visible light laser which illuminates the prism resin interface at selected incidence. For more information regarding products, visit video. The computer system positions the prism and spectroscopic cell relative to a visible light laser which illuminates the prism resin interface at selected incidence angles. Cyberscan vantage noncontact profiler with drs 8000 digital range sensor. Metricon 2010 prism coupler 633nm 1550nm, ge detector. Optical waveguide characterization metricons model 2010m system transforms prism coupling from an esoteric research technique into a.
The metricon located in the metrology section has three operating wavelength 632. The propagation loss of the films deposited on oxidized silicon wafers was measured using a metricon 2010 m prism coupler at 638, 847 and 1550 nm wavelength. Class a and b metals and compounds allowed not allowed tool category 11e, 2, 3, and 4 materials. A refractometer computer controls the rotation of a rotary plate upon which are mounted a prism optically coupled via an optical window to a spectroscopic cell holding a resin exhibiting a dynamic refractive index during photocuring. The metricon model 2010m prism coupler bulk material index, thick film. Optical waveguide characterization metricons model 2010m system transforms prism coupling from an esoteric research technique into a routine laboratory analysis measurement. The metricon model 2010m prism coupler utilizes advanced optical waveguiding techniques to rapidly and accurately measure both the thickness and the refractive indexbirefringence of dielectric and polymer films as well as refractive index of bulk materials. Metricon model 2010m prism coupler bulk material, thick. Measurement of thin film parameters with a prism coupler, dec. Nanometrics nanospec aft 200 thickness measurement system. Using a metricon 2010 prism coupler, the refractive index of the asevaporated film was determined to be 2.
Umech technologies microvision networked probe station. Metricon prism coupler mline model 2010 m it uses optical waveguiding techniques to rapidly and accurately measure both the thickness and the refractive indexbirefringence of dielectric and polymer films as well as refractive index of bulk materials. Metricon model 2010m prism coupler references lambda news. Oct 01, 2010 the metricon prism coupler is used to measure both the thickness and the te or tm refractive index of dielectric films. The refractive index of the mixture, together with that of pure c10h7br, was then measured at the wavelengths of 632.
Metricon s model 2010 m prism coupler provides fast and accurate measurement of optical waveguide loss. Metricon 2010 single wavelength prism coupler thin film. Find online auctions and classified ads for new and used metricon prism couplers at labx. The optical the optical module includes a prism, rotation stage, pneumatic actuated coupling. After further investigation, we determined that the holes were caused by nonevaporated solvent left over from step ii of the suggested process, and subsequently released during step iii due to the higher temperature. Metricon model 2010 prism coupler centre for research in.
Sep 01, 2020 in order to determine the optical loss of the deposited material, a set of 0. The metricon model 2010m prism coupler utilizes advanced optical waveguiding techniques to rapidly and accurately measure both the thickness and the. Osa theory of prismfilm coupler and thinfilm light guides. Rapid 20second characterization of thin film or diffused optical waveguides or spr sensor structures. Metricon 2010 prism coupler simple measurement of optical refractive index operating wavelengths. Metricon 2010 dual wavelength prism coupler thin film analyzer. Metricom 2010m dual wavelength prism coupler film thickness. Metricon s prism coupling instruments have been referenced in numerous scientific journal articles spanning a wide range of disciplines. Schedulingsignup restrictions materials compatibility category tool category 5. This coupler also allows an accurate measurement of the spectrum of propagating modes from which the refractive index and the thickness of the film can be determined.
Differential scanning calorimetry dsc data were obtained using a ta instruments dsc 2920. Lowloss geo2thin films deposited by ionassisted alternating. The metricon prism coupler 2010 allows wafer measurements of refractive index and thickness of thin films layer stack. With the 2010 m, wave guide characterization data which typically requires a skilled professional an hour or more to collect with home made apparatus can now be obtained in 30 seconds or less in a format providing complete documentation of results and. Metricon prism coupler a comparison to ellipsometry. Operating at wavelengths 532, 633, 972, 1038 and 1538 nm. A prismfilm coupler has been discussed recently by tien, ulrich, and martin as a device to couple efficiently a laser beam into thinfilm dielectric light guides. High refractive index nanocomposites corning incorporated. Indanedione based binary chromophore supramolecular systems. An initial short section entitled basic theory of prism coupling lists representative articles on the theory of thin film waveguides and the prism. Theory of measurement, metricon model 2010 prism coupler thin film thicknessrefractive index measurement system operating and maintenance guide rev. Dual wavelength prism coupler with 633nm hene laser and 1550nm diode laser, includes germanium detector option 2010 ge, 200p1 prism for low index films index prism coupler is a prism designed to couple a substantial fraction of the power contained in a beam of light e.
Operating conditions used for the metricon 2010 prism coupler were. Metricon 2010 prism coupler 633nm 1550nm, ge detector 1998 1280 price. Waveguide loss measurement this option measures loss of optical waveguides by scanning a fiber optic probe and photodetector down the length of a propagating streak to measure the light intensity scattered from the surface of the guide. Metricon model 2010m prism coupler bulk material, thick film. Metricon corporation has pioneered the practical application of prism coupling technology to problems of thin film, bulk material, and optical waveguide. The metricon model 2010 prism coupler sy stem consists of a controller and an optical m odule. Our nanofab lab facilities are located on the third floor of the advanced research complex arc at the university of ottawa 25 templeton st. Controllercomputer, qed duralaser power supply diode pumped solid state laser sytem, thermal printer dpo414, assorted cablesaccessories. Fabrication of surface plasmon waveguides and integrated. Other studies 5, 7 also experienced difficulties in measuring some particular lens materials which could be because of problem arising from a nonuniform ri at the lens surface. Pdf sicmoscompatible liftoff fabrication of lowloss. Ellipsometers, prism couplers,thin film metrology semistar.
Measurement of thin film parameters with a prism couple, appl. The metricon model 2010 m prism coupler utilizes advanced optical waveguiding techniques to rapidly and accurately measure both the thickness and the refractive index of dielectric and polymer films as well as refractive index of bulk materials. Metricons model 2010m prism coupler enables rapid characterization of refractive index, thickness and loss of optical waveguides. For more information regarding products, visit video demo\product inspection view. Pdf benzocyclobutene bcb 402235 polymer thin films by.
The device is used for determination of refractive index of bulk materials, thin films and liquid materials in the refractive index range of 1. Metricon 2010 single wavelength prism coupler thin film analyzer. Presspatterned diffraction gratings on high refractive. Optical characterization of thin films can be easily and accurately performed through the use of a prism coupler, specifically the metricon model 2010 prism coupler figure 1. Pdf refractive index and dispersion of highly fluorinated. Jun 01, 2010 the film thicknesses were measured by dektak 150 surface profiler, refractive indices at 532 and 1064 nm of films by mline method with metricon 2010 prism coupler. Although prism couplers and ellipsometers can both be used to measure the index of bulk materials and to simultaneously measure film thickness and refractive index. Prior to measurement, the surfaces of the exg glass substrate composite coating were blown using compressed air to remove dust. Optical constant n and k data were obtained from thin films using a j. The mp1200 is a superior, advanced, melt indexing system that is available in either manual or motorized configurations and features a new three zone band heater with three controllers that result in unparalleled temperature control of the furnace.
Presspatterned diffraction gratings on high refractive index. Optical properties of nanocrystalline la2o3 dielectric films. Prism coupler is used for measuring of thin films bulk materials refractive index thickness with minimal sample preparation. Refractive index of soft contact lens materials measured in. The nlo coefficients were obtained by least square fit of the experimental curves to theoretical approximation. Metricon 2010 prism coupler 633nm 1550nm, ge detector metricon 2010 prism coupler 633nm cyberscan vantage noncontact profiler with drs 8000 digital range sensor.
An initial short section entitled basic theory of prism coupling lists representative articles on the theory of thin film waveguides and the prism coupling technique. Find online auctions and classified ads fornew and used metricon prism couplers at labx. Sensors compensate for temperature and noise rendering levels. Frontier semiconductor measurements fsm 900tcvac200mm. Model 2010 m prism coupler includes one prism see below. Includes 633hene laser, prism code 957, pc, vga monitor, seiko dpu414 thermal printer. Indanedione based binary chromophore supramolecular. Metricon 2010m prism coupler system optical test equipment. Understanding and controlling plasmoninduced convection nature. Nanofab centre for research in photonics university of ottawa.
Final thicknesses and refractive indices of bcb films for various coating speeds and curing times were characterized by prism coupling system metricon 2010 and profilometer dektak3030st. Measure thickness and refractive index of dielectric films. Metricon model 2010 m prism coupler safety usage restrictions requires specific film thicknesses and substrates based on application. Prism coupler for thin film thickness and refractive index, bulk refractive index. All aspects of system operation, including table positioning and detection of modes, can be performed fully automatically or manually by the user. Nanofab centre for research in photonics university of. Optics 12 1973 29012908 and a prism coupler found in the metricon 2010 made by metricon corporation, p. Metricon s model 2010 m system transforms prism coupling from an esoteric research technique into a routine laboratory analysis measurement. Metricon model 2010m prism coupler and klatencor alphastep. Crpuo lab protocols and safety manual pdf version, 1,082 kb means of access. The system also allow the measures of dispersion, index gradients, dndt, and loss of optical waveguides. Woollam variable angle spectroscopic ellipsometer vase. Prior art refractometers include a prism coupler described in paper r.
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